검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Oxygen active species in an Ar-O-2 magnetron discharge for titanium oxide deposition Vancoppenolle V, Jouan PY, Ricard A, Wautelet M, Dauchot JP, Hecq M Applied Surface Science, 205(1-4), 249, 2003 |
| 2 |
Glow discharge mass spectrometry study of the deposition of TiO2 thin films by direct current reactive magnetron sputtering of a Ti target Vancoppenolle V, Jouan PY, Wautelet M, Dauchot JP, Hecq M Journal of Vacuum Science & Technology A, 17(6), 3317, 1999 |