검색결과 : 2건
No. | Article |
---|---|
1 |
CH4/H-2/Ar Electron-Cyclotron-Resonance Plasma-Etching for GaAs-Based Field-Effect Transistors Vanhassel JG, Vanes CM, Nouwens PA, Maahury JH, Kaufmann LM Journal of the Electrochemical Society, 142(8), 2849, 1995 |
2 |
Influence of in-Situ Argon Cleaning of GaAs on Schottky Diodes and Metal-Semiconductor Field-Effect Transistors Vanhassel JG, Heyker HC, Kwaspen JJ Journal of Vacuum Science & Technology B, 13(6), 2245, 1995 |