검색결과 : 22건
| No. | Article |
|---|---|
| 1 |
The effect of Cr barrier on interfacial reaction of Au/Zn/Au/Cr/Au contacts to p-type InGaAs/InP Huang JS, Vartuli CB Thin Solid Films, 446(1), 132, 2004 |
| 2 |
Comparison of inductively coupled plasma Cl-2 and Cl-4/H-2 etching of III-nitrides Cho H, Vartuli CB, Donovan SM, Abernathy CR, Pearton SJ, Shul RJ, Constantine C Journal of Vacuum Science & Technology A, 16(3), 1631, 1998 |
| 3 |
Electron-Cyclotron-Resonance Plasma-Etching of Algan in Cl-2/Ar and BCl3/Ar Plasmas Vartuli CB, Pearton SJ, Lee JW, Polyakov AY, Shin M, Greve DW, Skronowski M, Shul RJ Journal of the Electrochemical Society, 144(6), 2146, 1997 |
| 4 |
Inductively-Coupled Plasma-Etching of III-V Nitrides in CH4/H-2/Ar and CH4/H-2/N-2 Chemistries Vartuli CB, Pearton SJ, Lee JW, Mackenzie JD, Abernathy CR, Shul RJ, Constantine C, Barratt C Journal of the Electrochemical Society, 144(8), 2844, 1997 |
| 5 |
Plasma-Etching of III-Nitrides in ICl/Ar and IBr/Ar Plasmas Vartuli CB, Pearton SJ, Lee JW, Mackenzie JD, Abernathy CR, Shul RJ Journal of Vacuum Science & Technology A, 15(3), 638, 1997 |
| 6 |
Rapid Thermal-Processing of Ill-Nitrides Hong J, Lee JW, Vartuli CB, Abernathy CR, Mackenzie JD, Donovan SM, Pearton SJ, Zolper JC Journal of Vacuum Science & Technology A, 15(3), 797, 1997 |
| 7 |
Comparison of Ohmic Metallization Schemes for Ingaaln Ren F, Vartuli CB, Pearton SJ, Abernathy CR, Donovan SM, Mackenzie JD, Shul RJ, Zolper JC, Lovejoy ML, Baca AG, Hagerottcrawford M, Jones KA Journal of Vacuum Science & Technology A, 15(3), 802, 1997 |
| 8 |
Electron-Cyclotron-Resonance Etching of III-V Nitrides in IBr/Ar Plasmas Vartuli CB, Pearton SJ, Lee JW, Mackenzie JD, Abernathy CR, Shul RJ Journal of Vacuum Science & Technology B, 15(1), 98, 1997 |
| 9 |
Effect of BCl3 Dry-Etching on Inaln Surface-Properties Ren F, Lothian JR, Chen YK, Mackenzie JD, Donovan SM, Vartuli CB, Abernathy CR, Lee JW, Pearton SJ Journal of the Electrochemical Society, 143(9), L217, 1996 |
| 10 |
Selective Dry-Etching of III-V Nitrides in Cl-2/Ar, CH4/H-2/Ar, ICI/Ar, and IBr/Ar Vartuli CB, Pearton SJ, Mackenzie JD, Abernathy CR, Shul RJ Journal of the Electrochemical Society, 143(10), L246, 1996 |