화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 A shallow and deep trench isolation process module for RF BiCMOS
Forsberg M, Johansson T, Liu W, Vellaikal M
Journal of the Electrochemical Society, 151(12), G839, 2004
2 Electrical and Microstructural Characterization of Lead Titanate Thin-Films Deposited by Metal-Organic Chemical-Vapor-Deposition Onto Platinum and Magnesium-Oxide
Vellaikal M, Kingon AI
Thin Solid Films, 287(1-2), 139, 1996
3 Gas-Flow Effects in Synthesis of Diamond by Hot-Filament Chemical-Vapor-Deposition
Singh J, Vellaikal M, Dat R
Thin Solid Films, 238(1), 133, 1994