검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High-throughput electron-beam lithography with a raster-scanned, variably shaped beam Veneklasen LH, Kao HM, Rishton SA, Winter S, Boegli V, Newman T, Bertuccelli G, Howard G, Le P, Tan Z, Lozes R Journal of Vacuum Science & Technology B, 19(6), 2455, 2001 |
| 2 |
Demonstration of multiblanker electron-beam technology Winograd G, Krishnamurthi V, Garcia R, Veneklasen LH, Mankos M, Pease F Journal of Vacuum Science & Technology B, 18(6), 3052, 2000 |
| 3 |
Raster shaped beam pattern generation Rishton SA, Varner JK, Veneklasen LH, Boegli V, Sagle AL, Hofmann U, Kao H, Wang W Journal of Vacuum Science & Technology B, 17(6), 2927, 1999 |
| 4 |
Electron-optical optimization for Gaussian, high-current, high-dose columns Mankos M, Veneklasen LH, Garcia R, Pearce-Percy H Journal of Vacuum Science & Technology B, 16(6), 3206, 1998 |