검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
H2O Diffusion Barriers at Si-Si Direct Bonding Interfaces for Low Temperature Anneals Moriceau H, Rieutord F, Libralesso L, Ventosa C, Fournel F, Morales C, Mc Cormick T, Chevolleau T, Radu I Journal of the Electrochemical Society, 158(9), H919, 2011 |
| 2 |
Mechanism of Thermal Silicon Oxide Direct Wafer Bonding Ventosa C, Morales C, Libralesso L, Fournel F, Papon AM, Lafond D, Moriceau H, Penot JD, Rieutord F Electrochemical and Solid State Letters, 12(10), H373, 2009 |
| 3 |
Prebonding Thermal Treatment in Direct Si-Si Hydrophilic Wafer Bonding Ventosa C, Rieutord F, Libralesso L, Fournel F, Morales C, Moriceau H Journal of the Electrochemical Society, 156(11), H818, 2009 |