화학공학소재연구정보센터
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No. Article
1 Photocatalytic properties of titania thin films prepared by sputtering versus evaporation and aging of induced oxygen vacancy defects
Henkel B, Neubert T, Zabel S, Lamprecht C, Selhuber-Unkel C, Ratzke K, Strunskus T, Vergohl M, Faupel F
Applied Catalysis B: Environmental, 180, 362, 2016
2 Comparison of abrasive tests for transparent optical coatings
Bruns S, Montzka S, Reimann W, Vergohl M
Thin Solid Films, 532, 73, 2013
3 Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration
Rademacher D, Zickenrott T, Vergohl M
Thin Solid Films, 532, 98, 2013
4 Applications of HIPIMS metal oxides
Sittinger V, Lenck O, Vergohl M, Szyszka B, Brauer G
Thin Solid Films, 548, 18, 2013
5 High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns S, Vergohl M, Werner O, Wallendorf T
Thin Solid Films, 520(12), 4122, 2012
6 Properties of cosputtered SiO2-Ta2O5-mixtures
Polenzky C, Rickers C, Vergohl M
Thin Solid Films, 517(10), 3126, 2009
7 Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater
Sittinger V, Pflug A, Werner W, Rickers C, Vergohl M, Kaiser A, Szyszka B
Thin Solid Films, 502(1-2), 175, 2006
8 Investigation of TiO2 based thin films deposited by reactive magnetron sputtering for use at high temperatures
Hunsche B, Vergohl M, Ritz A
Thin Solid Films, 502(1-2), 188, 2006
9 Spectrally selective reflecting thin-film filters for laser display technology
Rickers C, Vergohl M
Thin Solid Films, 442(1-2), 145, 2003
10 Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering
Malkomes N, Vergohl M, Szyszka B
Journal of Vacuum Science & Technology A, 19(2), 414, 2001