1 |
Photocatalytic properties of titania thin films prepared by sputtering versus evaporation and aging of induced oxygen vacancy defects Henkel B, Neubert T, Zabel S, Lamprecht C, Selhuber-Unkel C, Ratzke K, Strunskus T, Vergohl M, Faupel F Applied Catalysis B: Environmental, 180, 362, 2016 |
2 |
Comparison of abrasive tests for transparent optical coatings Bruns S, Montzka S, Reimann W, Vergohl M Thin Solid Films, 532, 73, 2013 |
3 |
Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration Rademacher D, Zickenrott T, Vergohl M Thin Solid Films, 532, 98, 2013 |
4 |
Applications of HIPIMS metal oxides Sittinger V, Lenck O, Vergohl M, Szyszka B, Brauer G Thin Solid Films, 548, 18, 2013 |
5 |
High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets Bruns S, Vergohl M, Werner O, Wallendorf T Thin Solid Films, 520(12), 4122, 2012 |
6 |
Properties of cosputtered SiO2-Ta2O5-mixtures Polenzky C, Rickers C, Vergohl M Thin Solid Films, 517(10), 3126, 2009 |
7 |
Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater Sittinger V, Pflug A, Werner W, Rickers C, Vergohl M, Kaiser A, Szyszka B Thin Solid Films, 502(1-2), 175, 2006 |
8 |
Investigation of TiO2 based thin films deposited by reactive magnetron sputtering for use at high temperatures Hunsche B, Vergohl M, Ritz A Thin Solid Films, 502(1-2), 188, 2006 |
9 |
Spectrally selective reflecting thin-film filters for laser display technology Rickers C, Vergohl M Thin Solid Films, 442(1-2), 145, 2003 |
10 |
Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering Malkomes N, Vergohl M, Szyszka B Journal of Vacuum Science & Technology A, 19(2), 414, 2001 |