검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Surface modification and contamination characterization of ion-enhanced, implanted photoresist removal Kawaguchi MN, Papanu JS, Chen HW, Su B, Verhaverbeke S Journal of Vacuum Science & Technology B, 25(2), 459, 2007 |
| 2 |
The Etching Mechanisms of SiO2 in Hydrofluoric-Acid Verhaverbeke S, Teerlinck I, Vinckier C, Stevens G, Cartuyvels R, Heyns MM Journal of the Electrochemical Society, 141(10), 2852, 1994 |
| 3 |
Hydrogen Passivation of HF-Last Cleaned (100)Silicon Surfaces Investigated by Multiple Internal-Reflection Infrared-Spectroscopy Bender H, Verhaverbeke S, Heyns MM Journal of the Electrochemical Society, 141(11), 3128, 1994 |