검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of additional VHF plasma source base on conventional RF-PECVD for large area fast growth microcrystalline silicon films Kim YJ, Choi YS, Choi IS, Han JG Current Applied Physics, 11(5), S54, 2011 |
| No. | Article |
|---|---|
| 1 |
Effect of additional VHF plasma source base on conventional RF-PECVD for large area fast growth microcrystalline silicon films Kim YJ, Choi YS, Choi IS, Han JG Current Applied Physics, 11(5), S54, 2011 |