검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Surface reaction probabilities and kinetics of H, SiH3, Si2H5, CH3, and C2H5 during deposition of a-Si : H and a-C : H from H-2, SiH4, and CH2 discharges Perrin J, Shiratani M, Kae-Nune P, Videlot H, Jolly J, Guillon J Journal of Vacuum Science & Technology A, 16(1), 278, 1998 |