검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Lithography and Fabrication Processes for Sub-100 nm Scale Complementary Metal-Oxide-Semiconductor Wind SJ, Taur Y, Lee YH, Mii Y, Viswanathan RG, Bucchignano JJ, Pomerene AT, Sicina RM, Milkove KR, Stiebritz JW, Roy RA, Hu CK, Manny MP, Cohen S, Chen W Journal of Vacuum Science & Technology B, 13(6), 2688, 1995 |