검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Scanning proximal probes for parallel imaging and lithography Ivanova K, Sarov Y, Ivanov T, Frank A, Zollner J, Bitterlich C, Wenzel U, Volland BE, Klett S, Rangelow IW, Zawierucha P, Zielony M, Gotszalk T, Dontzov D, Schott W, Nikolov N, Zier M, Schmidt B, Engl W, Sulzbach T, Kostic I Journal of Vacuum Science & Technology B, 26(6), 2367, 2008 |
| 2 |
Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation Persaud A, Ivanova K, Sarov Y, Ivanov T, Volland BE, Rangelow IW, Nikolov N, Schenkel T, Djakov V, Jenkins DWK, Meijer J, Vogel T Journal of Vacuum Science & Technology B, 24(6), 3148, 2006 |
| 3 |
High-energy ion projection for deep ion implantation as a low cost high throughput alternative for subsequent epitaxy processes Meijer J, Burchard B, Ivanova K, Volland BE, Rangelow IW, Rub M, Deboy G Journal of Vacuum Science & Technology B, 22(1), 152, 2004 |
| 4 |
Profile simulation of gas chopping based etching processes Volland BE, Ivanov T, Rangelow IW Journal of Vacuum Science & Technology B, 20(6), 3111, 2002 |