검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparison of Acid Generation in EUV Lithography Films of Poly(4-hydroxystyrene) (PHS) and Noria Adamantyl Ester (Noria-AD(50)) Wu WQ, Nuzhdin K, Vyushkova M, Janik I, Bartels D Journal of Physical Chemistry B, 116(21), 6215, 2012 |