검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Collisional ion dynamics in capacitively coupled rf discharges Xiang N, Waelbroeck FL Journal of Vacuum Science & Technology A, 23(1), 23, 2005 |
| No. | Article |
|---|---|
| 1 |
Collisional ion dynamics in capacitively coupled rf discharges Xiang N, Waelbroeck FL Journal of Vacuum Science & Technology A, 23(1), 23, 2005 |