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| No. | Article |
|---|---|
| 1 |
Nitrogen dilution effects on structural and electrical properties of hot-wire-deposited a-SiN : H films for deep-sub-micron CMOS technologies Waghmare PC, Patil SB, Kumbhar AA, Rao R, Dusane RO Thin Solid Films, 430(1-2), 189, 2003 |