검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Novel method for cleaning a vacuum chamber from hydrocarbon contamination Wanzenboeck HD, Roediger P, Hochleitner G, Bertagnolli E, Buehler W Journal of Vacuum Science & Technology A, 28(6), 1413, 2010 |
| 2 |
Modeling of precursor coverage in ion-beam induced etching and verification with experiments using XeF2 on SiO2 Ebm C, Hobler G, Waid S, Wanzenboeck HD Journal of Vacuum Science & Technology B, 28(5), 946, 2010 |
| 3 |
Nanoimprint lithography stamp modification utilizing focused ion beams Wanzenboeck HD, Waid S, Bertagnolli E, Muehlberger M, Bergmair I, Schoeftner R Journal of Vacuum Science & Technology B, 27(6), 2679, 2009 |
| 4 |
Evaluation of chamber contamination in a scanning electron microscope Roediger P, Wanzenboeck HD, Hochleitner G, Bertagnolli E Journal of Vacuum Science & Technology B, 27(6), 2711, 2009 |
| 5 |
Electron beam induced deposition of iron nanostructures Hochleitner G, Wanzenboeck HD, Bertagnolli E Journal of Vacuum Science & Technology B, 26(3), 939, 2008 |
| 6 |
Custom design of optical-grade thin films of silicon oxide by direct-write electron-beam-induced deposition Wanzenboeck HD, Fischer M, Svagera R, Wernisch J, Bertagnolli E Journal of Vacuum Science & Technology B, 24(6), 2755, 2006 |
| 7 |
Compositional and electrical properties of zirconium dioxide thin films chemically deposited on silicon Harasek S, Wanzenboeck HD, Bertagnolli E Journal of Vacuum Science & Technology A, 21(3), 653, 2003 |
| 8 |
Metal-organic chemical vapor deposition and nanoscale characterization of zirconium oxide thin films Harasek S, Wanzenboeck HD, Basnar B, Smoliner J, Brenner J, Stoeri H, Gornik E, Bertagnolli E Thin Solid Films, 414(2), 199, 2002 |