검색결과 : 1건
No. | Article |
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1 |
Low-Temperature Fabrication of Amorphous-Silicon Thin-Film Transistors by DC Reactive Magnetron Sputtering Mccormick CS, Weber CE, Abelson JR, Davis GA, Weiss RE, Aebi V Journal of Vacuum Science & Technology A, 15(5), 2770, 1997 |