검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Multilayer coating and test of the optics for two new 10X Microstepper extreme-ultraviolet lithography cameras Montcalm C, Spiller E, Weber FJ, Wedowski M, Folta JA, Gullikson EM Journal of Vacuum Science & Technology B, 19(4), 1219, 2001 |
| 2 |
Extreme ultraviolet lithography mask patterning and printability studies with a Ta-based absorber Mangat PJS, Hector SD, Thompson MA, Dauksher WJ, Cobb J, Cummings KD, Mancini DP, Resnick DJ, Cardinale G, Henderson C, Kearney P, Wedowski M Journal of Vacuum Science & Technology B, 17(6), 3029, 1999 |