검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Introduction of zirconium oxide in a hardmask concept for highly selective patterning of scaled high aspect ratio trenches in silicon Paul J, Riedel S, Rudolph M, Wege S, Czernohorsky M, Sundqvist J, Hohle C, Beyer V Thin Solid Films, 520(14), 4527, 2012 |
| 2 |
Compact and Inexpensive Quartz Capillaritron Source Bautsch M, Varadinek P, Wege S, Niedrig H Journal of Vacuum Science & Technology A, 12(2), 591, 1994 |