검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electrical properties of TaxNy films by implementing OES in the sputtering system Lu YM, Weng RJ, Hwang WS, Yang YS Materials Chemistry and Physics, 72(2), 278, 2001 |
| 2 |
Study of phase transition and electrical resistivity of tantalum nitride films prepared by DC magnetron sputtering with OES detection system Lu YM, Weng RJ, Hwang WS, Yang YS Thin Solid Films, 398-399, 356, 2001 |