검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of Thick Doped Polysilicon Films with Low-Stress in an Epitaxial Reactor for Surface Micromachining Applications Kirsten M, Wenk B, Ericson F, Schweitz JA, Riethmuller W, Lange P Thin Solid Films, 259(2), 181, 1995 |