화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 High-power collimated laser-plasma source for proximity x-ray nanolithography
Gaeta CJ, Rieger H, Turcu ICE, Forber RA, Campeau SM, Cassidy KL, Powers MF, Stone A, Maldonado JR, Mrowka S, French G, Naungayan J, Kelsy C, Hark P, Morris JH, Foster RM, Carosella JC, Fleming D, Selzer F, Siegert H, Smith HI, Lim MH, Cheng Z, Burdett J, Gibson D, Whitlock RR, Dozier CM, Newman DA
Journal of Vacuum Science & Technology B, 21(1), 280, 2003
2 Plasma and X-UV source characteristics for Al targets heated by 40 ns Nd-laser pulses
Whitlock RR, Greig JR, Nagel DJ, Topscher SJ
Journal of Vacuum Science & Technology B, 19(4), 1241, 2001