검색결과 : 1건
No. | Article |
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1 |
Computer-Simulation of Mass-Selective Plasma-Source Ion-Implantation Shohet JL, Wickesberg EB, Kushner MJ Journal of Vacuum Science & Technology A, 12(4), 1380, 1994 |
No. | Article |
---|---|
1 |
Computer-Simulation of Mass-Selective Plasma-Source Ion-Implantation Shohet JL, Wickesberg EB, Kushner MJ Journal of Vacuum Science & Technology A, 12(4), 1380, 1994 |