검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Laterally resolved ion-distribution functions at the substrate position during magnetron sputtering of indium-tin oxide films Plagernann A, Ellmer K, Wiesemann K Journal of Vacuum Science & Technology A, 25(5), 1341, 2007 |
| 2 |
Study of plasma polymerization from acetylene in pulsed r.f. discharges Zajickova L, Rudakowski S, Becker HW, Meyer D, Valtr M, Wiesemann K Thin Solid Films, 425(1-2), 72, 2003 |
| 3 |
Characterization of Plasma-Surface Contacts in Low-Pressure RF Discharges Using Ion Energy Analysis and Langmuir Probes Flender U, Wiesemann K Plasma Chemistry and Plasma Processing, 15(2), 123, 1995 |
| 4 |
Langmuir Probe Measurements During Plasma-Activated Chemical-Vapor-Deposition in the System Argon/Hydrogen/Dicyclopentadienyldimethylhafium Spatenka P, Petig M, Wiesemann K, Suhr H Plasma Chemistry and Plasma Processing, 15(3), 371, 1995 |