검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators Fischer LM, Wilding N, Gel M, Evoy S Journal of Vacuum Science & Technology B, 25(1), 33, 2007 |
| 2 |
Fabrication of nanoelectromechanical resonators using a cryogenic etching technique Nelson-Fitzpatrick N, Westra K, Li P, McColman S, Wilding N, Evoy S Journal of Vacuum Science & Technology B, 24(6), 2769, 2006 |