검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Morphology and integration of rough polycrystalline silicon films for DRAM storage cell applications Banerjee A, Crenshaw DL, Wise RL, Khamankar RB, Pas MF Journal of the Electrochemical Society, 146(6), 2289, 1999 |
| 2 |
Selective hemispherical grained polysilicon transformation for 256 MB, 1 GB dynamic random access memory and beyond Mansoori MM, Banerjee A, Shimizu A, Mori Y, Wise RL, Pas MF, Chatterjee B Journal of the Electrochemical Society, 146(10), 3827, 1999 |
| 3 |
Moderately in situ phosphorus-doped polycrystalline silicon by single wafer reduced pressure chemical vapor deposition Violette KE, Wise RL Journal of Vacuum Science & Technology B, 16(3), 1082, 1998 |