검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dry etch selectivity of a-C:H hardmasks for sub-65 nm patterning applications Padhi D, Kim BH, Witty D Journal of Vacuum Science & Technology B, 27(4), 1809, 2009 |
| No. | Article |
|---|---|
| 1 |
Dry etch selectivity of a-C:H hardmasks for sub-65 nm patterning applications Padhi D, Kim BH, Witty D Journal of Vacuum Science & Technology B, 27(4), 1809, 2009 |