검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A method for copper film deposition with Cl-2 plasma Sakamoto H, Ogura Y, Ooba Y, Nishimori T, Yahata N Journal of the Electrochemical Society, 151(3), C200, 2004 |
| No. | Article |
|---|---|
| 1 |
A method for copper film deposition with Cl-2 plasma Sakamoto H, Ogura Y, Ooba Y, Nishimori T, Yahata N Journal of the Electrochemical Society, 151(3), C200, 2004 |