화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Control of active nitrogen species used for PA-MBE growth of group III nitrides on Si
Ohachi T, Yamabe N, Yamamoto Y, Wada M, Ariyada O
Journal of Crystal Growth, 318(1), 468, 2011
2 Interface roughness of double buffer layer of GaN film grown on Si(1 1 1) substrate using GIXR analysis
Yamamoto Y, Yamabe N, Ohachi T
Journal of Crystal Growth, 318(1), 474, 2011
3 Measurement of nitrogen atomic flux for RF-MBE growth of GaN and AlN on Si substrates
Ohachi T, Yamabe N, Shimomura H, Shimamura T, Ariyada O, Wada M
Journal of Crystal Growth, 311(10), 2987, 2009
4 Nitridation of Si(111) for growth of 2H-AlN(0001)/beta-Si3N4/Si(111) structure
Yamabe N, Shimomura H, Shimamura T, Ohachi T
Journal of Crystal Growth, 311(10), 3049, 2009