화학공학소재연구정보센터
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No. Article
1 Epitaxial growth and crystalline properties of Ge1-x-ySixSny on Ge(001) substrates
Asano T, Terashima T, Yamaha T, Kurosawa M, Takeuchi W, Taoka N, Nakatsuka O, Zaima S
Solid-State Electronics, 110, 49, 2015
2 Effect of Sn on crystallinity and electronic property of low temperature grown polycrystalline-Si1-x-yGexSny layers on SiO2
Yamaha T, Kurosawa M, Ohmura T, Takeuchi W, Taoka N, Nakatsuka O, Zaima S
Solid-State Electronics, 110, 54, 2015
3 Atom probe tomography study on Ge1-x - ySnxCy hetero-epitaxial film on Ge substrates
Kamiyama E, Sueoka K, Terasawa K, Yamaha T, Nakatsuka O, Zaima S, Izunome K, Kashima K, Uchida H
Thin Solid Films, 592, 54, 2015
4 Characterization of crystalline structures of SiGe substrate formed by traveling liquidus-zone method for devices with Ge/SiGe structures
Yamaha T, Nakatsuka O, Taoka N, Kinoshita K, Yoda S, Zaima S
Thin Solid Films, 557, 129, 2014
5 Low temperature formation of Si1-x-yGexSny-on-insulator structures by using solid-phase mixing of Ge1-zSnz/Si-on-insulator substrates
Nakatsuka O, Mochizuki K, Shimura Y, Yamaha T, Zaima S
Thin Solid Films, 520(8), 3288, 2012
6 Influence of retarding hydrogen diffusion in boron phosphosilicate glass on annealing damage of metal-oxide semiconductor transistors
Yamaha T, Masuoka F
Journal of the Electrochemical Society, 146(8), 3065, 1999
7 Roles of Cap-Metal on via Electromigration Resistance in Aluminum-Based Interconnections
Yamaha T, Naito M, Hotta T
Journal of the Electrochemical Society, 143(3), 1043, 1996
8 Electromigration Characteristics of Sputtered Tin/Ti/Alsicu/Tion/Ti Interconnects with Aluminum Reflow
Yamaha T, Naito M
Journal of the Electrochemical Society, 143(10), 3297, 1996
9 Enhanced Hot-Carrier Degradation Due to Water-Related Species in Plasma-Enhanced Tetraethoxysilane Oxide
Yamaha T, Inoue Y, Fujioka T, Hanagasaki O, Hotta T
Journal of the Electrochemical Society, 142(8), 2743, 1995
10 Field-Inversion Induced by Water from Outside in a Spin-on-Glass Nonetchback Complementary Metal-Oxide-Semiconductor Process
Yamaha T, Inoue Y, Hanagasaki O, Hotta T
Journal of the Electrochemical Society, 142(9), 3132, 1995