검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Reaction between magnesium ammine complex compound and lithium hydride Tsubota M, Hino S, Fujii H, Oomatsu C, Yamana M, Ichikawa T, Kojima Y International Journal of Hydrogen Energy, 35(5), 2058, 2010 |
| 2 |
Dependence of spectral changes on coordinated species to lanthanide-diphthalocyanine Kashiwazaki N, Yamana M Electrochimica Acta, 46(13-14), 2211, 2001 |
| 3 |
High contrast chemically amplified 193 nm resist for gigabit dynamic random access memory generation Itani T, Yoshino H, Yamana M, Takimoto M, Tanabe H Journal of Vacuum Science & Technology B, 17(6), 3322, 1999 |
| 4 |
Dissolution characteristics of chemically amplified 193 nm resists Itani T, Yoshino H, Hashimoto S, Yamana M, Miyasaka M, Tanabe H Journal of Vacuum Science & Technology B, 16(6), 3726, 1998 |
| 5 |
Polymer structure effect on dissolution characteristics and acid diffusion in chemically amplified deep ultraviolet resists Itani T, Yoshino H, Hashimoto S, Yamana M, Samoto N, Kasama K Journal of Vacuum Science & Technology B, 15(6), 2541, 1997 |
| 6 |
Investigation of the notching effect for single layer deep ultraviolet resist processing Yoshino H, Itani T, Hashimoto S, Yamana M, Yoshii T, Samoto N, Kasama K Journal of Vacuum Science & Technology B, 15(6), 2601, 1997 |
| 7 |
A Study of Acid Diffusion in Chemically Amplified Deep-Ultraviolet Resist Itani T, Yoshino H, Hashimoto S, Yamana M, Samoto N, Kasama K Journal of Vacuum Science & Technology B, 14(6), 4226, 1996 |