검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Control of surface mobility for conformal deposition of Mo-Si multilayers on saw-tooth substrates Voronov DL, Anderson EH, Gullikson EM, Salmassi F, Warwick T, Yashchuk VV, Padmore HA Applied Surface Science, 284, 575, 2013 |
| 2 |
Development of pseudorandom binary arrays for calibration of surface profile metrology tools Barber SK, Soldate P, Anderson EH, Cambie R, McKinney WR, Takacs PZ, Voronov DL, Yashchuk VV Journal of Vacuum Science & Technology B, 27(6), 3213, 2009 |