검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging Song X, Yeap KB, Zhu J, Belnoue J, Sebastiani M, Bemporad E, Zeng KY, Korsunsky AM Thin Solid Films, 520(6), 2073, 2012 |
| 2 |
Nanomechanical characterization of sputtered RuO2 thin film on silicon substrate for solid state electronic devices Zhu J, Yeap KB, Zeng KY, Lu L Thin Solid Films, 519(6), 1914, 2011 |