화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 The effect of contact resistance on current crowding and electromigration in ULSI multi-level interconnects
Huang JS, Yeh ECC, Zhang ZB, Tu KN
Materials Chemistry and Physics, 77(2), 377, 2003
2 A robust multilevel interconnect module for subquartermicrometer complementary metal oxide semiconductor technology integration
Zhang ZB, Huang JS, Twiford M, Martin E, Layadi N, Salah A, Bhowmik B, Vitkavage D, Lytle S, Yeh ECC, Tu KN
Journal of the Electrochemical Society, 149(5), G324, 2002