화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Structural and electrical characteristics of chemical vapor deposited W/n-Si0.83Ge0.17/Si(001) and chemical vapor deposited WSix/n-Si0.83Ge0.17/Si(001)
Jang YC, Shin DO, Kim KS, Shim KH, Lee NE, Youn SP, Roh KJ, Roh YH
Journal of Vacuum Science & Technology A, 19(4), 1046, 2001
2 Interface formation and electrical properties of a TiNx/SiO2/Si structure for application in gate electrodes
Kim KS, Jang YC, Kim KJ, Lee NE, Youn SP, Roh KJ, Roh YH
Journal of Vacuum Science & Technology A, 19(4), 1164, 2001
3 Study of electrical and interfacial properties of CVD-W/p-Si0.83Ge0.17/Si(001)
Jang YC, Kim KS, Shin DO, Kim HJ, Shim KH, Lee NE, Youn SP, Roh KJ, Roh YH
Thin Solid Films, 377-378, 640, 2000