검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Viscosity measurement of nanoimprint lithography resists with a rheological nanoindenter Svintsov AA, Trofimov OV, Zaitsev SI Journal of Vacuum Science & Technology B, 25(6), 2435, 2007 |
| 2 |
Energy dependence of proximity parameters investigated by fitting before measurement tests Aparshina LI, Dubonos SV, Maksimov SV, Svintsov AA, Zaitsev SI Journal of Vacuum Science & Technology B, 15(6), 2298, 1997 |
| 3 |
3-Dimensional Design in Electron-Beam Lithography Aristov VV, Dubonos SV, Dyachenko RY, Gaifullin BN, Matveev VN, Raith H, Svintsov AA, Zaitsev SI Journal of Vacuum Science & Technology B, 13(6), 2526, 1995 |
| 4 |
Dose Contribution of Heating in Electron-Beam Lithography Svintsov AA, Zaitsev SI Journal of Vacuum Science & Technology B, 13(6), 2550, 1995 |