검색결과 : 1건
No. | Article |
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1 |
Tungsten allylimido complexes Cl-4(RCN)W(NC3H5) as single-source CVD precursors for WNxCy thin films. Correlation of precursor fragmentation to film properties Bchir OJ, Green KM, Ajmera HM, Zapp EA, Anderson TJ, Brooks BC, Reitfort LL, Powell DH, Abboud KA, McElwee-White L Journal of the American Chemical Society, 127(21), 7825, 2005 |