검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Optimization of In0.53Ga0.47As reactive ion etching with CH4/H-2 using design of experiment methods Zavieh L, Nordquist CD, Mayer TS Journal of Vacuum Science & Technology B, 16(3), 1024, 1998 |
| No. | Article |
|---|---|
| 1 |
Optimization of In0.53Ga0.47As reactive ion etching with CH4/H-2 using design of experiment methods Zavieh L, Nordquist CD, Mayer TS Journal of Vacuum Science & Technology B, 16(3), 1024, 1998 |