검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Structural and optical properties of titanium aluminum nitride films (Ti1-xAlxN) Schuler A, Thommen V, Reimann P, Oelhafen P, Francz G, Zehnder T, Duggelin M, Mathys D, Guggenheim R Journal of Vacuum Science & Technology A, 19(3), 922, 2001 |
| 2 |
Determination of Limits in Deposition of Adhering A-C Films on Silicon Produced by Pulsed-Laser Deposition Zehnder T, Balmer J, Luthy W, Weber HP Thin Solid Films, 263(2), 198, 1995 |
| 3 |
SiC Films Prepared by Pulsed Excimer-Laser Deposition Zehnder T, Blatter A, Bachli A Thin Solid Films, 241(1-2), 138, 1994 |