검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Molecular dynamics simulations of CF3 etching of SiC Gou F, Zen LT, Meng CL Thin Solid Films, 516(8), 1832, 2008 |
| No. | Article |
|---|---|
| 1 |
Molecular dynamics simulations of CF3 etching of SiC Gou F, Zen LT, Meng CL Thin Solid Films, 516(8), 1832, 2008 |