검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Application of Zr-Si Film as Diffusion Barrier in Cu Metallization (vol 10, pg H299, 2007) Wang Y, Cao F, Song ZX, Zhaoa CH Electrochemical and Solid State Letters, 12(8), S11, 2009 |
| 2 |
Application of Zr-Si film as diffusion barrier in Cu metallization Wang Y, Cao F, Song Z, Zhaoa CH Electrochemical and Solid State Letters, 10(10), H299, 2007 |