검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Balancing the etching and passivation in time-multiplexed deep dry etching of silicon Blaw MA, Zijlstra T, van der Drift E Journal of Vacuum Science & Technology B, 19(6), 2930, 2001 |
| 2 |
Novel method for solution growth of thin silica films from tetraethoxysilane Vossen DLJ, de Dood MJA, van Dillen T, Zijlstra T, van der Drift E, Polman A, van Blaaderen A Advanced Materials, 12(19), 1434, 2000 |
| 3 |
Kinetics and crystal orientation dependence in high aspect ratio silicon dry etching Blauw MA, Zijlstra T, Bakker RA, van der Drift E Journal of Vacuum Science & Technology B, 18(6), 3453, 2000 |
| 4 |
High speed anisotropic dry etching of CoNbZr for next generation magnetic recording Andriesse MS, Zijlstra T, van der Drift E Journal of Vacuum Science & Technology B, 18(6), 3462, 2000 |
| 5 |
Fabrication of two-dimensional photonic crystal waveguides for 1.5 mu m in silicon by deep anisotropic dry etching Zijlstra T, van der Drift E, de Dood MJA, Snoeks E, Polman A Journal of Vacuum Science & Technology B, 17(6), 2734, 1999 |
| 6 |
Fabrication and Analysis of Extreme-Ultraviolet Reflection Masks with Patterned W/C Absorber Bilayers Voorma HJ, Louis E, Koster NB, Bijkerk F, Zijlstra T, Degroot LE, Rousseeuw BA, Romijn J, Vanderdrift EW, Friedrich J Journal of Vacuum Science & Technology B, 15(2), 293, 1997 |
| 7 |
Interactive effects in reactive ion etching of W1-xGex van der Drift E, Dinh BQ, Verhoeven PA, Fakkeldij EJM, Zuiddam MR, Zijlstra T Journal of Vacuum Science & Technology B, 15(6), 2676, 1997 |
| 8 |
High-Resolution Reactive Ion Etching and Damage Effects in the Si/Gexsi1-X System Cheung R, Zijlstra T, Vanderdrift E, Geerligs LJ, Verbruggen AH, Werner K, Radelaar S Journal of Vacuum Science & Technology B, 11(6), 2224, 1993 |