검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Sorption of CO2 and a CO2 Compatible Salt into an Extreme Ultraviolet Photoresist Film on a SiO2 Substrate Zweber AE, Wagner M, Carbonell RG Journal of Physical Chemistry B, 113(29), 9687, 2009 |
| 2 |
Mechanism of Extreme Ultraviolet Photoresist Development with a Supercritical CO2 Compatible Salt Zweber AE, Wagner M, DeYoung J, Carbonell RG Langmuir, 25(11), 6176, 2009 |