검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Growth kinetics and structure formation of ZrO2 thin films in chloride-based atomic layer deposition process Aarik J, Aidla A, Mandar H, Uustare T, Sammelselg V Thin Solid Films, 408(1-2), 97, 2002 |
| No. | Article |
|---|---|
| 1 |
Growth kinetics and structure formation of ZrO2 thin films in chloride-based atomic layer deposition process Aarik J, Aidla A, Mandar H, Uustare T, Sammelselg V Thin Solid Films, 408(1-2), 97, 2002 |