검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Charging response of back-end-of-the-line barrier dielectrics to VUV radiation Sinha H, Lauer JL, Antonelli GA, Nishi Y, Shohet JL Thin Solid Films, 520(16), 5300, 2012 |
| 2 |
Dielectric properties and resistance to fatigue failure of different barrier layers prepared on flexible stainless-steel foils by ion-beam assisted deposition Li YQ, Yu ZN, Leng J, Wang HQ, Chen S, Dong YH, Jin G Thin Solid Films, 520(21), 6556, 2012 |
| 3 |
Investigation of the electrical properties and reliability of amorphous SiCN Chen CW, Chang TC, Liu PT, Tsai TM, Huang HC, Chen JM, Tseng CH, Liu CC, Tseng TY Thin Solid Films, 447, 632, 2004 |