화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Comparison of ordered structure in buried oxide layers in high-dose, low-dose, and internal-thermal-oxidation separation-by-implanted-oxygen wafers
Shimura T, Fukuda K, Yasutake K, Hosoi T, Umeno M
Thin Solid Films, 476(1), 125, 2005
2 Analysis of the breakdown voltage in SOI and SOS technologies
Roig J, Vellvehi M, Flores D, Rebollo J, Millan J, Krishnan S, De Souza MM, Narayanan EMS
Solid-State Electronics, 46(2), 255, 2002