검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Phase transformation of tantalum on different dielectric films with plasma treatment Huang CC, Wang YL, Chang SC, Hwang GJ, Huang JL Thin Solid Films, 498(1-2), 286, 2006 |
| 2 |
The influence of temperature and dielectric materials on stress induced voiding in Cu dual damascene interconnects Gan ZG, Shao W, Mhaisalkar SG, Chen Z, Li HY Thin Solid Films, 504(1-2), 161, 2006 |
| 3 |
Characterization of tetra methyl cyclo tetra siloxanes-based low-k dielectric film Widodo J, Lu W, Mhaisalkar SG, Hsia LC, Tan PY, Shen L, Zeng KY Thin Solid Films, 462-63, 213, 2004 |