검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ion energy distribution at an r.f.-biased electrode in an inductively coupled plasma affected by collisions in a sheath Mizutani N, Hayashi T Thin Solid Films, 374(2), 167, 2000 |
| No. | Article |
|---|---|
| 1 |
Ion energy distribution at an r.f.-biased electrode in an inductively coupled plasma affected by collisions in a sheath Mizutani N, Hayashi T Thin Solid Films, 374(2), 167, 2000 |