검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Pulsed reactive chemical vapor deposition in the C-Ti-Si system from H-2/TiCl4/SiCl4 Jacques S, Di-Murro H, Berthet MP, Vincent H Thin Solid Films, 478(1-2), 13, 2005 |
| No. | Article |
|---|---|
| 1 |
Pulsed reactive chemical vapor deposition in the C-Ti-Si system from H-2/TiCl4/SiCl4 Jacques S, Di-Murro H, Berthet MP, Vincent H Thin Solid Films, 478(1-2), 13, 2005 |