검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of GaAs and GaInP etching in Cl-2/Ar electron cyclotron resonance plasma Yoon SF, Ng TK, Zheng HQ Thin Solid Films, 394(1-2), 250, 2001 |
| No. | Article |
|---|---|
| 1 |
Study of GaAs and GaInP etching in Cl-2/Ar electron cyclotron resonance plasma Yoon SF, Ng TK, Zheng HQ Thin Solid Films, 394(1-2), 250, 2001 |